VBG01 Series high vacuum butterfly valves are widely used on crystal
growth furnaces, which are used for monocrystalline silicon wafer
production. These valves can be zero leakage in very low pipe pressure,
which is lower to 1.3*10^(-5) Pa. Forged stainless steel body and special
sealing structure design, to ensure valve's long life cycles.
Technical Parameters
·Valve Body Material:SS304/SS316L
·Seat Seal Material:FKM, NBR in option
·Vacuum Range:10^5 -6.7x10^(-5) Pa
·Leak Rate:1.3x10^(-5) Pa. L/s
·Cycles Until Service:80,000 Times
·Angle Opening:0-90 Degree
·Temperature Range:(1)FKM Seat Seal:-30°C to 150°C (2)NBR Seat Seal:-25°C to 80°C
·Operated:Manual, Pneumatic Actuator, Electric,Actuator
·Compressed Air:0.4-0.8Mpa
·Operating Time:(1)Aluminium Actuator:≤3S (2)Electric Actuator on-off type:Standard 30 S. 10S, 15S option
·Solenoid Voltage:(1)Standard:AC220V,50Hz,6W(2)Optional:AC110V, DC24V, DC12V
·Pneumatic Actuator:1.Standard: Double Acting 2.Optional:(1) Normally Close (2)Normally Open
·Electric Actuator:1.Standard: On-off type 2.Optional:Regulating control type
·Available with Position Indicator:Optional signal feedback
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