Used as ventilation, shut-off or high-vacuum valves, butterfly valves have a
simple structure, and can be installed in the vacuum exhaust line of a
semiconductor tools. Butterfly Valves are characterised by their compact design,
and high conductance. Made of stainless steel 304 or 316L, these valves are also
available manually operated or electro pneumatically.
Design and Feature
·Swivel valve plate with FKM seal
·Compact size and light weight,easy installing
·Minimal face-to-face dimension,Minimal installing space
·Flow by adjusting the degree of opening and can be set to an arbitrary degree
of opening.
Technical Parameters
·Valve Body Material:SS304/SS316L
·Seat Seal Material:FKM, NBR in option
·Vacuum Range:10^5 -6.7x10^(-5) Pa
·Leak Rate:1.3x10^(-5) Pa. L/s
·Cycles Until Service:100,000 Times
·Angle Opening:0-90 Degree
·Temperature Range:(1)FKM Seat Seal:-30°C to 150°C (2)NBR Seat Seal:-25°C to 80°C
·Operated:Manual, Pneumatic Actuator, Electric,Actuator
·Compressed Air:0.4-0.8Mpa
·Opening/Close Speed:(1)Aluminium Actuator:≤3S (2)Electric Actuator on-off type:Standard 30 S. 10S, 15S option
·Solenoid Voltage:AC220V,50Hz,6W or on request
·Standard Electric Actuator:On-off type
·Available with Position Indicator:Optional signal feedback
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